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Beilstein J. Nanotechnol. 2019, 10, 1636–1647, doi:10.3762/bjnano.10.159
Figure 1: (a) Schematic illustration of CR-AFM imaging on the flexible circuit sample. (b) An enlarged sectio...
Figure 2: Subsurface imaging of the flexible circuit sample with a top layer thickness of 52 nm measured via ...
Figure 3: Influence of the applied force on CR-AFM subsurface imaging of the flexible circuit sample with a 5...
Figure 4: Influence of cantilever stiffness on CR-AFM subsurface imaging of the flexible circuit sample with ...
Figure 5: The influence of cantilever oscillation eigenmode on CR-AFM subsurface imaging of a flexible circui...
Figure 6: Influence of cover thickness on CR-AFM subsurface imaging of the circuit sample. (a–e) Frequency im...
Figure 7: Influence of thickness and material properties of each layer on subsurface imaging of the circuit p...
Figure 8: Optimization of CR-AFM subsurface imaging on a flexible circuit sample. (a,b) CR-AFM frequency imag...
Figure 9: Subsurface imaging of defects in the buried circuit pattern using CR-AFM. (a) Schematic illustratio...